Modeling and validation of acoustic performances of micro-acoustic sources for hearing applications

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• 作者：Giorgio De Pasquale^a ; ^{giorgio.depasquale@polito.it" class="auth_mail" title="E-mail the corresponding author}Author Vitae ; Libor Rufer^b ; ^cAuthor Vitae ; Skandar Basrour^b ; ^cAuthor Vitae ; Aurelio Somà ; ^aAuthor Vitae
• 关键词：Microfluidics ; Diaphragms ; FEM ; MEMS-CMOS ; Experimental micromechanics
• 刊名：Sensors and Actuators A: Physical
• 出版年：2016
• 出版时间：15 August 2016
• 年：2016
• 卷：247
• 期：Complete
• 页码：614-628
• 全文大小：6399 K

文摘

We report on a micro-acoustic source based on industrial 0.35 μm CMOS-MEMS process with only one additional post-process step. The fabrication flow completed with the characterization results of an electrostatic micro-acoustic source based on 0.35 μm CMOS process with sacrificial SiO₂ etch is shown here for the first time. The acoustic pressure in air in the vicinity of the resonant frequency (32 kHz) at the distance of 10 mm from the source was measured. The acoustic pressure of 12 mPa was obtained when the source was driven by an AC signal of 6 V_AC and a DC bias of 8 V_DC.