文摘
CuInSe2 single crystals are studied by the Rutherford Backscattering of 2 MeV helium ions involving axial channeling along the ¡´2 2 1¡µ direction of the chalcopyrite lattice. Experimental values of the critical angle and normalized minimum yield are measured and compared with theory. The concentration of point defects separately in the Cu, In, and Se sublattices, determined from the comparison of experimental and theoretical minimum yields, are estimated as 4.7 ¡Á 1020, 1.0 ¡Á 1020, and 5.7 ¡Á 1020 cm?3, respectively.