The ITO/Ag grid/AZO hybrid electrodes were prepared at room temperature. The ITO/Ag grid/AZO electrodes indicated a high FOM value of 8.8 × 10−2 Ω−1. The processing temperature of perovskite solar cell was lower than 150 °C. The high PCE of 13.8% was obtained by using ITO/Ag grid/AZO electrode.