Generalized phase shifting interferometry based on Lissajous calibration technology
详细信息 查看全文
- 作者：Fengwei Liua ; b ; fengweiliu@126.com" class="auth_mail" title="E-mail the corresponding author ; Yongqian Wua ; Fan Wua ; Weihong Songa
- 关键词：Lissajous calibration ; Interferometry ; Least squares method ; Advanced iterative algorithm ; Random phase shifting
- 刊名：Optics and Lasers in Engineering
- 出版年：2016
- 出版时间：August 2016
- 年：2016
- 卷：83
- 期：Complete
- 页码：106-115
- 全文大小：3095 K
文摘
- •
A novel GPSA is proposed based on lissajous calibration technology.
- •
Proposed method is less sensitive to the non-uniform background and modulation.
- •
There’s no global sign ambiguous problem of the extracted phase of proposed method.
- •
Proposed method has a higher accuracy and speed than AIA.
- •
The susceptibility of GDRA is discussed when systematic or random error is introduced.