Large-displacement actuating and high-frequency vibrating characteristics of silicon-based antiferroelectric (Pb, La)(Zr, Ti)O3 thick-film micro-cantilevers
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- 作者：Kun Ana ; Li Liub ; Peng Zhangc ; Jian Heb ; Xiujian Choub ; chouxiujian@nuc.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Chenyang Xueb ; Wendong Zhangc
- 关键词：Antiferroelectric thick film ; Micro-cantilever ; High frequency vibration ; Large-displacement actuation
- 刊名：Microelectronic Engineering
- 出版年：2016
- 出版时间：16 August 2016
- 年：2016
- 卷：162
- 期：Complete
- 页码：45-50
- 全文大小：1355 K
文摘
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Si-based Antiferroelectric (Pb, La) (Zr, Ti) O3 thick films micro-cantilevers were fabricated by bulk silicon micro-machining technology.
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The antiferroelectricity of micro-cantilever was proofed by typical double hysteresis loop of square-like.
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The vibration displacement and vibration velocity of micro-cantilever increased with the cantilever's the length increasing, but the response frequency has the opposite trend.