CMOS Integrated Nanocrystalline SnO₂ Gas Sensors for CO Detection

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• 作者：E. Lackner^a ; J. Krainer^a ; R. Wimmer-Teubenbacher^a ; F. Sosada^a ; C. Gspan^b ; K. Rohracher^c ; E. Wachmann^c ; A. Koeck^a ; ^{anton.koeck@mcl.at}
• 关键词：CMOS integration ; gas sensors ; tin dioxide ultrathin film ; microhotplates ; carbon monoxide
• 刊名：Procedia Engineering
• 出版年：2016
• 出版时间：2016
• 年：2016
• 卷：168
• 期：Complete
• 页码：297-300
• 全文大小：326 K
• 卷排序：168

文摘

In this work, we present gas sensors based on nanocrystalline SnO2 ultrathin films, which were integrated on microhotplate chips fabricated by CMOS technology. The gas sensitive films, with a thickness of 50nm, were deposited on the microhotplate by a spray pyrolysis process. The CMOS integrated sensor resistance was significantly decreased in the presence of carbon monoxide. A sensor response of up to 50% is achieved at an operating temperature of 375̊C. The microhotplate chips presented here enable 3D integration of different gas sensing systems by through-silicon-via technology. Such 3D-integrated nanosensors are promising candidates for building smart gas sensor devices for daily life applications.