Effects of periphery encapsulation material on the characteristics of micro vacuum dielectric capacitor

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• 作者：Oi Ying Wong ; Wing Shan Tam ; Oi Kan Shea ; Shiu Hung Cheung ; Jun Liu ; C.W. Kok ; H. Wong
• 刊名：Microelectronics Reliability
• 出版年：2009
• 出版时间：May 2009
• 年：2009
• 卷：49
• 期：5
• 页码：506-509
• 全文大小：379 K

文摘

The effects of the periphery sealant on the electrical characteristics of vacuum dielectric capacitors (VDCs) are modeled. For the square shape VDCs, their characteristics are predominantly determined by the ratio of capacitor side length versus the width of boundary sealant layer, r. The smaller of the r value, the smaller of the dissipation factor, and the better frequency response of the VDCs are found. To achieve a dissipation factor of less than 10⁻⁵ at 1 GHz, the dimension parameter, r, should be smaller than 0.05 which has been achieved based on the present technology for a capacitor with size larger than 4 mm × 4 mm. The leakage current can also be reduced significantly in the VDCs. We found that the leakage current is mainly governed by the Poole–Frenkel emission of electrons over the periphery region. The present results have demonstrated that the VDC structure is a promising technology option for making high-frequency micro capacitors.