Application of blue laser direct-writing equipment for manufacturing of periodic and aperiodic nanostructure patterns
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- 作者：Po-Yu Chena ; jamihotshot@yahoo.com.tw" class="auth_mail" title="E-mail the corresponding author ; n98991051@mail.ncku.edu.tw" class="auth_mail" title="E-mail the corresponding author ; Wen-Yuh Jyweb ; jywe@nfu.edu.tw" class="auth_mail" title="E-mail the corresponding author ; Ming-Shi Wanga ; mswang@mail.ncku.edu.tw" class="auth_mail" title="E-mail the corresponding author ; Chia-Hung Wub ; a58707110@hotmail.com" class="auth_mail" title="E-mail the corresponding author
- 关键词：Laser direct-writing ; Positioning stage ; Nano-precision stage ; Linear motor precision stage ; Nanostructure ; Laser interferometer
- 刊名：Precision Engineering
- 出版年：2016
- 出版时间：October 2016
- 年：2016
- 卷：46
- 期：Complete
- 页码：263-269
- 全文大小：2543 K
文摘
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This study presents the novel development of low cost and high efficiency blue laser direct-writing equipment.
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The fabrication of periodic and aperiodic nanostructure patterns via mask-less laser lithography.
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The 3-DOF laser interferometer measurement system is used to feedback the displacement (X, Y, θz) of the equipment to the control system.
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The equipment is capable of fabricating various large area periodic nanostructure patterns, aperiodic nanostructure patterns, and two-dimensional patterns.
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The equipment positioning accuracy is 50 nm at speed 50 mm/s and has a minimum critical dimension about 100 nm.