Highly transparent and conductive Sn/F and Al co-doped ZnO thin films prepared by sol-gel method

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• 作者：Zhanchang Pan ; Junming Luo ; Xinlong Tian ; Shoukun Wu ; Chun Chen ; Jianfeng Deng ; Chumin Xiao ; Guanghui Hu ; Zhigang Wei
• 关键词：Al doped ZnO ; Al&ndash ; Sn co-doped ZnO ; Al&ndash ; F co-doped ZnO ; XPS ; Sol&ndash ; gel method
• 刊名：Journal of Alloys and Compounds
• 出版年：15 January, 2014
• 年：2014
• 卷：583
• 期：Complete
• 页码：32-38
• 全文大小：1741 K

文摘

Al doped ZnO, Al-Sn co-doped ZnO and Al-F co-doped ZnO nanocrystals were successfully synthesized onto glass substrates by the sol-gel method. The structure and morphology of the films are characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and high resolution transmission electron microscopy (HRTEM). The results indicated that all the films were polycrystalline with a hexagonal wurtzite structure and exhibited a c-axis preferred orientation. The electrical and optical properties were also investigated by 4-point probe device and Uv-vis spectroscopy, room temperature photoluminescence (PL) and Raman spectrum (Raman), respectively. The PL and Raman results suggested that the co-doped films with a very low defect concentration and exhibit a better crystallinity than AZO thin films. The XPS study confirmed the incorporation of Al, Sn and F ions in the ZnO lattice.