Deposition of silicon oxide coatings by atmospheric pressure plasma jet for oxygen diffusion barrier applications
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- 作者：Haitao Zhang ; Zheng Guo ; Qiang Chen ; Xinwei Wang1 ; Zhengduo Wang ; Zhongwei Liu ; liuzhongwei@bigc.edu.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：Atmospheric pressure ; Barrier film ; Plasma jet ; Silicon oxide coatings
- 刊名：Thin Solid Films
- 出版年：2016
- 出版时间：30 September 2016
- 年：2016
- 卷：615
- 期：Complete
- 页码：63-68
- 全文大小：1813 K
文摘
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We reported a system for the silicon oxide coating deposition by an atmospheric pressure plasma jet.
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The excited nitrogen species play important roles in the decomposition of hexamethyldisiloxane.
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The oxygen transmission rate decreased with increasing the hexamethyldisiloxane concentration.
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The oxygen transmission rate of the coating on polyimide was as low as 0.7 ml/m2/day.