Sub-nanometer misalignment aberrations calibration of the Fizeau interferometer for high-numerical-aperture spherical surface ultra-precision measurement

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• 作者：Zhongming Yang ; ^{zhongming_yang@126.com" class="auth_mail" title="E-mail the corresponding author} ; Zhishan Gao ; Shuai Wang ; Xinxing Wang ; Qiqi Shi
• 关键词：Interferometry ; Misalignment aberration ; High numerical aperture ; Spherical surface measurement ; Calibration
• 刊名：Optik - International Journal for Light and Electron Optics
• 出版年：2015
• 出版时间：October 2015
• 年：2015
• 卷：126
• 期：19
• 页码：1865-1871
• 全文大小：1799 K

文摘

Misalignment aberrations in Fizeau interferometric testing system can significantly influence the measurement results in the case of high-numerical-aperture test spherical surfaces, and it is hard to separate the high-order misalignment aberrations from the measured data. The traditional calibration method, which is based on linear-approximation, is applicable in calibrating only the linear misalignment aberration in measurement of high-numerical-aperture spherical surfaces. Based on modified power term for interferometry and 4-overlapping averaging 9-frame algorithm, sub-nanometer accuracy high-order calibration method is proposed to calibrate the linear misalignment aberrations as well as high-order misalignment aberrations. Both the computer simulation and experimental results confirm the feasibility and accuracy of the proposed calibration technique, and sub-nanometer misalignment aberrations can be calibrated. The proposed method can also used in spherical surface ultra-precision measurement by other interferometric setups without foreknowledge of numerical aperture of the test surface.