The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation

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• 作者：Jiangtao  ; Chen ; Xingbin  ; Yan  ; ;   ; ^{xbyan@licp.cas.cn} ; Wenwen  ; Liu ; Qunji  ; Xue[Author vitae]
• 关键词：ZnO film ; Ion implantation ; Magnetron sputtering ; Ethanol gas sensor
• 刊名：Sensors and Actuators B: Chemical
• 出版年：2011
• 出版时间：15 December 2011
• 年：2011
• 卷：160
• 期：1
• 页码：1499-1503
• 全文大小：1145 K

文摘

The authors present the gas sensors using magnetron sputtered ZnO films modified by Ag ion implantation. The results indicate the sensing response of ZnO films is improved by Ag ion implantation, and the sensing response increases with the Ag ion implantation doses. The possible reason of the improved sensing property is that the metallic Ag distributed on the nanograins of implanted ZnO films enhances chemical adsorption and promote catalytic reaction at the surface. However, after long-time conservation, obvious response deterioration for the Ag ion implanted ZnO sensor took place.