The structural and electrical properties of oriented films prepared by metal organic deposition method

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• 作者：Xiaofei Wang ; Xiaomei Lu ; Huifeng Bo ; Yaoyang Liu ; Yanchi Shen ; Xiaobo Wu ; Wei Cai ; Yi Kan ; Chao Zhang ; Yunfei Liu ; Fengzhen Huang ; Jinsong Zhu
• 关键词：A. Oriented SrTiO₃ film ; B. Metal organic deposition ; D. Electrical property
• 刊名：Solid State Communications
• 出版年：2010
• 出版时间：September 2010
• 年：2010
• 卷：150
• 期：35-36
• 页码：1637-1640
• 全文大小：784 K

文摘

Strontium titanate films with high a-axis orientation [a₍₁₀₀₎=94.1 % ] and random orientation were deposited on (111) Pt/Ti/ SiO₂/Si substrates by a concentration controlling of the precursor solution during the metal organic deposition process. Topography of samples was investigated by atomic force microscopy after annealing at 800 °C. X-ray diffraction found that the degree of a-axis orientation increased with increasing annealing temperature. The leakage current and the dielectric property were strongly dependent on the film orientation, and the possible causes of orientation dependence were discussed.