Double side polydimethylsiloxane gradient gratings as vectorial displacement sensing elements
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- 作者：Hao Guo ; Jun Tang ; tangjun@nuc.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Kun Qian ; Miaomiao Zhao ; Jiangtao Yang ; Wei Zhang ; Binzhen Zhang ; Jun Liu ; liuj@nuc.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Chenyang Xue ; Wendong Zhang
- 关键词：Vectorial displacement ; Gradient gratings ; Double side PDMS ; Sensing element
- 刊名：Microelectronic Engineering
- 出版年：2016
- 出版时间：1 May 2016
- 年：2016
- 卷：157
- 期：Complete
- 页码：24-30
- 全文大小：1840 K
文摘
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The orthogonal gradient optical grating structure fabricated on both sides of PDMS substrate pre-bent as a shape of ellipse.
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Any vectorial displacement can be quantitatively characterized in both the x and y directions.
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The error was small to be 0.4% and a resolution of 300μm-1.
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The structure can be acted as a single element sensor applied for multi-axis integrated displacement sensors.