Ion irradiation tolerance of TiSiN nanocomposite coating
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- 作者：Q. Wan ; B. Yang ; toyangbing@163.com" class="auth_mail" title="E-mail the corresponding author ; H.D. Liu ; Q.S. Mei ; Y.M. Chen
- 关键词：Thin films ; Nanocomposite ; Irradiation damage ; Microstructure ; Indentation ; Hardness
- 刊名：Surface and Coatings Technology
- 出版年：2016
- 出版时间：15 November 2016
- 年：2016
- 卷：305
- 期：Complete
- 页码：165-169
- 全文大小：1279 K
文摘
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TiN and TiSiN coatings were irradiated by He+ ion.
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Amorphous layer has been observed in these coatings.
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Nanohardness and modulus of these coatings decreased after irradiation.
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Irradiation damage decreased with the decrease of the grain size.
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The optimum grain size of Ti
SiN was around 9 nm.