The leakage current mechanisms of Al/Tm2O3/Si stack structures were extracted.
The conduction mechanisms are Schottky emission and Frenkel-Poole conduction.
The barrier height for Pt/Tm2O3 and Al/Tm2O3 are 2.95 eV and 1.75 eV.
The energy band diagrams of Pt (Al)/Tm2O3/Si capacitor were constructed.