Energy band diagram of metal/Tm2O3/Si stack structure acquired from the study of leakage current mechanisms
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文摘

The leakage current mechanisms of Al/Tm2O3/Si stack structures were extracted.

The conduction mechanisms are Schottky emission and Frenkel-Poole conduction.

The barrier height for Pt/Tm2O3 and Al/Tm2O3 are 2.95 eV and 1.75 eV.

The energy band diagrams of Pt (Al)/Tm2O3/Si capacitor were constructed.

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