Three dimensional multilayer solenoid microcoils inside silica glass
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- 作者：Xiangwei Meng ; Qing Yang ; Feng Chen ; chenfeng@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Chao Shan ; Keyin Liu ; Yanyang Li ; Hao Bian ; Jinhai Si ; Xun Hou
- 关键词：Femtosecond laser processing ; Multilayers microcoils ; 3D solenoid microcoils ; Silica glass
- 刊名：Optics & Laser Technology
- 出版年：2016
- 出版时间：January 2016
- 年：2016
- 卷：76
- 期：Complete
- 页码：29-32
- 全文大小：1247 K
文摘
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3D solenoid multilayer microcoils with high uniformity were fabricated.
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An alloy with high melting point was chosen as the conductive metal.
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The multilayer microcoils with complex winding way were smartly controlled.
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The inductance of microcoils was measured, quality factor was calculated.