Experimental investigation on photoelectric properties of ZAO thin film deposited on flexible substrate by magnetron sputtering
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- 作者：Ming Haoa ; Kun Liua ; kliu@mail.neu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; liukunsend@gmail.com" class="auth_mail" title="E-mail the corresponding author ; Xinghua Liub ; Dongyang Wanga ; Dechun Baa ; Yuanhua Xiea ; Guangyu Dua ; Yaoshuai Baa
- 关键词：ZAO thin films ; RF ; Magnetron sputtering ; Flexible PET substrate ; Photoelectric properties
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：1 December 2016
- 年：2016
- 卷：388
- 期：part_PA
- 页码：259-267
- 全文大小：2380 K
文摘
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ZAO thin films were deposited on PET substrate.
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A set of experimental parameters were systematically investigated.
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Change rule of film photoelectric properties was obtained.
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ZAO films with optimal properties were obtained at our working conditions.