A study of intrinsic amorphous silicon thin film deposited on flexible polymer substrates by magnetron sputtering
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- 作者：Kun Liua ; kliu@mail.neu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Wenhao Yaoa ; Dongyang Wanga ; Dechun Baa ; dchba@mail.neu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Hailong Liub ; Xiaoguang Guc ; Donghui Mengd ; Guangyu Dua ; Yuanhua Xiea ; Yaoshuai Baa
- 关键词：Amorphous silicon solar cells ; Flexible substrate ; Roll-to-roll (R2R) ; Magnetron sputtering ; Sputtering power ; Working pressure ; Working temperature
- 刊名：Journal of Non-Crystalline Solids
- 出版年：2016
- 出版时间：1 October 2016
- 年：2016
- 卷：449
- 期：Complete
- 页码：125-132
- 全文大小：1732 K
文摘
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Amorphous silicon thin films were deposited on PET substrate.
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Experimental parameters were systematically investigated.
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Deposition rate on PET increased remarkably with sputtering power.
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Different processing parameters affect the deposition rate of amorphous silicon significantly.
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Absorption coefficient of thin films reduced with wavelength.