Laser cleaning of particle and grease contaminations on the surface of optics

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• 作者：Yayun Ye ; ^{yeyayun8617@163.com} ; Xiaodong Yuan ; Xia Xiang ; Xiaofeng Cheng ; Xinxiang Miao
• 关键词：Laser cleaning ; Laser plasma shockwave cleaning ; SiO2 particles ; K9 glass ; CO2 laser cleaning ; Dimethylsilicone oil ; Gold-coated K9 glass
• 刊名：Optik - International Journal for Light and Electron Optics
• 出版年：2012
• 出版时间：June, 2012
• 年：2012
• 卷：123
• 期：12
• 页码：1056-1060
• 全文大小：475 K

文摘

In the high power laser facility, surface contaminations on the optics will worsen the laser beam quality and damage the optics. Particle and grease contaminations are two of the usual contaminations on the surface of optics. In this work, the 1064-nm laser induced plasma shockwave cleaning is utilized to remove SiO₂ particle contaminations on the K9 glass surface. The results indicate the removal ratio can reach above 95 % . The effects of parameters (particle position, laser gap distance and laser energy) on the cleaning efficiency have been studied in the case of single pulse laser cleaning. In addition, CO₂ laser (10.6 ¦Ìm) is utilized to remove the dimethylsilicone oil contaminations on the gold-coated K9 glass surface. The results show that CO₂ laser can effectively remove the dimethylsilicone oil by properly controlling the laser parameters. The cleaned area increases with the increased laser power or irradiation time when the other parameters are constant.