A U-shape linear piezoelectric motor with double driving feet is proposed and bonded-type structure to realize the miniaturization.
Three orthogonal longitudinal vibrations are superimposed in the motor to produce elliptical movements on the two feet.
Maximum speed and thrust force of 765 mm/s and 7.3 N are reached by a prototype with weight of 0.026 kg.
The maximum power density of the prototype is 46.15 W/kg, which is about 6.4 times of a previous work.