Mirror control with strain feedback and charge drive for high-performance of scanning probe microscope positioners
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- 作者：Jie ZhangAuthor Vitae ; Liansheng ZhangAuthor Vitae ; Yongbin LiuAuthor Vitae ; Zhihua Feng ; fff@ustc.edu.cn" class="auth_mailAuthor Vitae
- 关键词：Piezoelectric actuators ; Mirror control ; Strain feedback ; Charge drive ; AFM
- 刊名：Sensors and Actuators A: Physical
- 出版年：1 August 2014
- 年：2014
- 卷：214
- 期：Complete
- 页码：134-141
- 全文大小：2107 K
文摘
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An integrated control method based on mirror control for piezoelectric actuators is proposed.
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The proposed method makes strain feedback and charge drive complementary.
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The proposed method can drive grounded load and output high voltages.
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High linearity, low hysteresis and good low frequency response were achieved.
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The propose method was successfully implemented in an atomic force microscopy for low distortion scanning images.