Synthesis of mesoporous SnO₂-SiO₂ composites and their application as quartz crystal microbalance humidity sensor

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• 作者：Ye Zhu ; Junchen Chen ; Huimin Li ; Yongheng Zhu ; Jiaqiang Xu
• 关键词：Humidity sensor ; Mesoporous ; QCM ; SnO2&ndash ; SiO2 ; Sol&ndash ; gel
• 刊名：Sensors and Actuators B: Chemical
• 出版年：31 March, 2014
• 年：2014
• 卷：193
• 期：Complete
• 页码：320-325
• 全文大小：1048 K

文摘

In this paper, chemically derived mesoporous SnO₂-SiO₂ composite was deposited on a transducer of quartz crystal microbalances (QCMs) to construct a humidity sensor for wide range humidity detection. The composite was synthesized through a facile one-pot sol-gel method and characterized by XRD, TEM, EDX, ICP and nitrogen adsorption-desorption test. The humidity sensing characteristics of the QCMs coated with SnO₂-SiO₂ composites thin film were investigated by exposing the QCMs to various relative humidity (RH) environments at room temperature, including sensitivity and linearity, response and recovery, and humidity-hysteresis. The results exhibit that the sample with a atomic ratio of Sn/Si = 1:1 shows better humidity sensing properties than others within the range of 11-96.1% relative humidity (RH), and the sensor also displays rapid response and recovery about 14 s and 16 s, respectively. The nanocomposite also shows suitable sensitivity and low hysteresis, revealing its great potential in humidity sensors.