Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part II: Application Case Study

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• 作者：Vijay Shilpiekandula ; ^{svijay@mit.edu" class="auth_mail" title="E-mail the corresponding author} ; Kamal Youcef-Toumi
• 关键词：Flexure-based mechanisms ; Nanopositioning ; Topology Generation ; Synthesis
• 刊名：IFAC-PapersOnLine
• 出版年：2011
• 出版时间：January 2011
• 年：2011
• 卷：44
• 期：1
• 页码：9397-9405
• 全文大小：243 K

文摘

Flexure-based mechanisms contain slender beam-like modules that undergo linear elastic deflections over small ranges of motion at nanoscale resolutions. They are hence often used as bearing elements in nanopositioning systems, along with precision actuator and sensing subsystems. An integrated design and control methodology proposed in Part I of this paper proposed varying design topology and controller order for meeting performance requirements of the closed-loop controlled system. A detailed set of steps was given for meeting requirements such as a desired static or dynamic load-capacity, bandwidth, or range of motion. In this part of the paper, an application case study for a practical precision positioning and alignment system is worked out to illustrate the steps involved in using the proposed methodology. The details of optimization problem formulation and solutions for design and control are presented. The outcome of the exercise is a novel design topology, with it shape and size optimized, and a controller synthesized such that a desired control bandwidth and design requirements of strength and modal separation are met.