Oxidant effect of La(NO₃)₃·6H₂O solution on the crystalline characteristics of nanocrystalline ZrO₂ films grown by atomic layer deposition

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• 作者：Nam Khen Oh^a ; ^b ; ¹ ; Jin-Tae Kim^b ; ^d ; ¹ ; Goru Kang^b ; Jong-Ki An^b ; Minwoo Nam^b ; So Yeon Kim^a ; In-Sung Park^c ; ^{parkis77@hanyang.ac.kr} ; Ju-Young Yun^b ; ^d ; ^{jyun@kriss.re.kr}
• 关键词：ZrO2 ; Atomic layer deposition ; La(NO3)3· ; 6H2O solution ; Agglomeration ; Crystalline structure ; Grain size
• 刊名：Applied Surface Science
• 出版年：2017
• 出版时间：1 February 2017
• 年：2017
• 卷：394
• 期：Complete
• 页码：231-239
• 全文大小：2823 K
• 卷排序：394

文摘

The La(NO3)3·6H2O aqua solution is introduced as an oxidant in ALD process. The H2O and La(NO3)3·6H2O lead different crystalline properties of ZrO2 films. Concentration of La(NO3)3·6H2O solution minimally influences crystalline status.