Wide-temperature range CMOS capacitance to digital convertor for MEMS pressure sensors
详细信息 查看全文
- 作者：Yucai Wang yucai.wang@mail.mcgill.ca" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Vamsy P. Chodavarapu ; vamsy.chodavarapu@mcgill.ca" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae
- 关键词：CMOS sensor electronics ; Wide-temperature electronics ; Capacitance to digital converter ; MEMS capacitive pressure sensor interface
- 刊名：Sensors and Actuators A: Physical
- 出版年：2015
- 出版时间：1 September 2015
- 年：2015
- 卷：233
- 期：Complete
- 页码：302-309
- 全文大小：2749 K
文摘
- •
A complementary metal-oxide-semiconductor (CMOS) capacitance to digital converter (CDC) for Microelectromechanical systems (MEMS) capacitive pressure sensors, that is functional over a wide temperature range from −55 °C to 225 °C.
- •
The proposed circuit uses a sigma–delta technique to convert the input ratio between sensor and reference capacitors into a digital output.
- •
Simulation results show that the circuit has better than 0.03% accuracy between −55 °C and 225 °C.
- •
Experimental results show it has good temperature stability, resolution of 1.44fF, and accuracy of 2.4% between −20 °C and 225 °C.