Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques

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• 作者：Tatsuya Kikuchi ; ^{kiku@eng.hokudai.ac.jp} ; Yuhta Wachi ; Taka-aki Takahashi ; Masatoshi Sakairi ; Ryosuke O. Suzuki
• 关键词：Aluminum ; Anodizing ; Laser irradiation ; Electropolishing ; Microlens array
• 刊名：Electrochimica Acta
• 出版年：2013
• 出版时间：1 April, 2013
• 年：2013
• 卷：94
• 期：Complete
• 页码：269-276
• 全文大小：1433 K

文摘

An anodic alumina microlens array was fabricated by laser irradiation and electrochemical techniques. An aluminum specimen covered with a porous oxide film was irradiated with a pulsed Nd-YAG laser, and then electropolished to dissolve the aluminum substrate. A well-defined semi-elliptical micropore was formed on the aluminum by electropolishing. The immersion of the electropolished specimen in a CrO₃/H₃PO₄ solution resulted in the dissolution of the remaining anodic oxide film. Subsequent re-anodizing enabled the formation of a characteristic meniscus-shaped oxide film on the micropore. A microlens array made of the thin anodic alumina film, which showed flexibility and heat resistance, was successfully fabricated by the lift-off of the anodic oxide.