Decorative black TiCxOy film fabricated by DC magnetron sputtering without importing oxygen reactive gas
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- 作者：Katsushi Ono ; Masao Wakabayashi ; Yukio Tsukakoshi ; Yoshiyuki Abe ; Yoshiyuki_Abe@ni.smm.co.jp" class="auth_mail" title="E-mail the corresponding author
- 关键词：TiCxOy coatings ; Decorative black films ; DC magnetron sputtering
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：28 February 2016
- 年：2016
- 卷：364
- 期：Complete
- 页码：69-74
- 全文大小：1428 K
文摘
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Decorative black TiCxOy film fabricated by dc magnetron sputtering at high pressure using no oxygen gas.
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Easy control of oxygen content in film by sputtering gas pressure.
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Little dependence of carbon content in film on sputtering gas pressure.
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Combination of attractive black color and good heat resisting property, unlike TiCxOy film by conventional reactive sputtering.