Wear behavior of annealed atomic layer deposited alumina

详细信息    查看全文

• 作者：Zakaria Hsain^a ; Guosong Zeng^a ; Nicholas C. Strandwitz^b ; Brandon A. Krick^a ;
• 关键词：Alumina ; Atomic layer deposition ; ALD ; Sliding wear ; Annealing
• 刊名：Wear
• 出版年：2017
• 出版时间：15 February 2017
• 年：2017
• 卷：372-373
• 期：Complete
• 页码：139-144
• 全文大小：1282 K
• 卷排序：372

文摘

Wear rates of ALD alumina coatings were measured relative to annealing temperature. Annealing at 1000 °C decreased the wear rate by about two orders of magnitude. Improvement in wear performance is attributed primarily to crystallization.