The detection of the biotin–streptavidin interaction is presented based on surface stress changes of functionalized Si membranes. During the biomolecular interaction, the surface stress of the functionalized membranes alters resulting in their deflection and finally in capacitance variations. The biological interaction on the sensors surface was verified after each experiment using fluorescent microscopy. Successful detection of 21 nM of streptavidin using 3.55 mM biotin probes is presented.