Characterization of packaged inline-type radio frequency microelectromechanical systems power sensors
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- 作者：Zhiqiang Zhang ; Xiaoping Liao
- 关键词：Microelectromechanical systems (MEMS) membrane ; Packaging ; Phase noise ; Response time ; Temperature effect
- 刊名：Sensors and Actuators A: Physical
- 出版年：2013
- 出版时间：15 October, 2013
- 年：2013
- 卷：201
- 期：Complete
- 页码：294-301
- 全文大小：2547 K
文摘
This paper proposes the characterization of 8-10 GHz inline-type radio frequency microelectromechanical systems (RF MEMS) power sensors on the packaging-test-fixture for power self-detection systems in RF receivers and transmitters. The sensors are used to convert a certain percentage of the RF power coupled by a MEMS membrane into thermovoltages based on Seebeck effect. Two packaging methods are studied to evaluate the RF performance by the simulation and the measurement. The effects of the temperature from 5 ¡ãC to 75 ¡ãC on the packaged power sensors are quantified by the measurement of the output thermovoltages, which result in the 33.2 % change in sensitivity at 10 GHz. After the packaging, rise and fall response times of <10 ms are obtained. In addition, measured mechanical resonance frequency (f1st) of the MEMS membrane in the sensors is 78 kHz. Experiments show that the single-sideband phase noise of the packaged power sensors is as low as ?122 dBc/Hz at the offset frequency ¦¤f = 500 kHz for an input RF signal of 100 mW and 9 GHz, and the sensors do not generate any significant phase noise in the interested RF range.