The surface morphology of homoepitaxial GaN (0001) was studied. The surface morphology shows a dependence on the substrate crystallographic orientation. InGaN-based blue laser diode wafers were grown on substrates with off-cut towards the [11¯00]direction. The photoluminescence peak wavelength and spectra line width of laser diode show substrate off-cut angle dependence. An off-cut angle of around 0.5° towards the [11¯00] direction is a more optimized substrate parameter.