A novel surface recovery algorithm in white light interferometry
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- 作者：Zili Lei ; Xiaojun Liu ; Liangzhou Chen ; chenlz@hust.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Wenlong Lu ; Suping Chang
- 关键词：WLI ; Recovery ; Envelop curve ; Multi reference position
- 刊名：Measurement
- 出版年：2016
- 出版时间：February 2016
- 年：2016
- 卷：80
- 期：Complete
- 页码：1-11
- 全文大小：2674 K
文摘
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The proposed algorithm is more robust to some disturbance conditions.
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Errors caused by wrongly detecting coherence peak in VSWLI are avoided.
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Robustness by correlation analysis of WLI envelop curves and multi reference positions.