The study of doped DLC films by Ti ion implantation

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• 作者：Cui ; Liu ; Guoqing ; Li ; Wenwu ; Chen ; Zongxin ; Mu ; Chengwu ; Zhang ; Liang ; Wang
• 关键词：Diamond-like carbon films ; Ion implantation ; Ti doped
• 刊名：Thin Solid Films
• 出版年：2005
• 出版时间：March 22, 2005
• 年：2005
• 卷：475
• 期：1-2
• 页码：279-282
• 全文大小：560 K

文摘

Diamond-like carbon (DLC) films were prepared by unbalanced magnetron sputtering. Ti-doped DLC films were obtained by Ti ion implanted into the achieved DLC films using metal vapor vacuum arc (MEVVA). The effects of Ti⁺ ion implantation on the surface morphology, structure, and tribological properties of the DLC films were investigated by means of atomic force microscopy (AFM), Raman spectroscopy, transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), and friction measurement. The smooth and uniform Ti-doped film with the surface roughness of 0.595 nm was obtained. Raman result revealed that the formation of DLC films and sp² bonds content increase by Ti⁺ ion implantation. TEM showed that the nanocrystalline phases of TiC were formed in the films. Ti⁺ was implanted into the interface between C and substrate, detecting the sputtering depth profiles of the film by XPS; thus, the interface was widened due to reserve diffusion. Tribological test experiment indicated that friction coefficient of the films decreased to approximately 0.15 by Ti⁺ ion implantation.