Effect of substrate temperature on structural, morphological, optical and electrical properties of IGZO thin films

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• 作者：Vinoth Kumar Jayaraman ; ^{vkumarj@cinvestav.mx} ; Arturo Maldonado &Aacute ; lvarez ; Mar&iacute ; a de la luz Olvera Amador
• 关键词：Gallium ; Indium ; Co-doping ; Spray pyrolysis ; IGZO ; ZnO
• 刊名：Physica E: Low-dimensional Systems and Nanostructures
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：86
• 期：Complete
• 页码：164-167
• 全文大小：547 K
• 卷排序：86

文摘

IGZO thin films were deposited by ultrasonic spray pyrolysis. Films were grown at different substrate temperatures (425, 450 and 475 °C). Structural, morphological, optical and electrical properties were studied. Films showed transmittance >70% and minimum resistivity ~10.5×10−3 Ω cm.