Scratch direction and threshold force in nanoscale scratching using atomic force microscopes

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• 作者：Ampere A. Tseng^a ; ¹ ; ^{ampere.tseng@asu.edu"" rel=""nofollow} ; Chung-Feng Jeffrey Kuo^a ; Shyankay Jou^a ; Shinya Nishimura^b ; Jun-ichi Shirakashi^b
• 关键词：Atomic force microscopy ; Contact force ; Machining ; Morphology ; Nanofabrication ; Scratching ; Scanning direction ; Scratch direction ; Threshold force
• 刊名：Applied Surface Science
• 出版年：2011
• 出版时间：1 September 2011
• 年：2011
• 卷：257
• 期：22
• 页码：9243-9250
• 全文大小：1291 K

文摘

The nanoscaled tip in an AFM (atomic force microscope) has become an effective scratching tool for material removing in nanofabrication. In this article, the characteristics of using a diamond-coated pyramidal tip to scratch Ni–Fe thin film surfaces was experimentally investigated with the focus on the evaluation of the influence of the scratch or scan direction on the final shape of the scratched geometry as well as the applied scratch force. Results indicated that both the scratched profile and the scratch force were greatly affected by the scratch direction. It has been found that, to minimize the formation of protuberances along the groove sides and to have a better control of the scratched geometry, the tip face should be perpendicular to the scratching direction, which is also known as orthogonal cutting condition. To demonstrate the present findings, three groove patterns have been scratched with the tip face perpendicular to the scratching direction and very little amount of protuberances was observed. The threshold scratch force was also predicted based on the Hertz contact theory. Without considering the surface friction and adhesive forces between the tip and substrate, the threshold force predicted was twice smaller than the measurement value. Finally, recommendations for technical improvement and research focuses are provided.