An investigation of the optical and structural properties of PECVD a-SiH thin films grown on a porous anodic aluminum template

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• 作者：S. Dhahri^a ; ^{sami.dhahri.85@gmail.com} ; E. Fazio^b ; M. Ghrib^a ; F. Neri^b ; K. El Khirouni^c ; H. Ezzaouia^a
• 关键词：Amorphous Si nanoparticles ; Porous aluminum ; Hydrogenated amorphous silicon ; PECVD ; Substrate temperature
• 刊名：Journal of Alloys and Compounds
• 出版年：2017
• 出版时间：30 March 2017
• 年：2017
• 卷：699
• 期：Complete
• 页码：991-997
• 全文大小：2631 K
• 卷排序：699

文摘

Effect of substrate temperature on the structural/optical properties of Si:H films. The effect of PAl layer on the optical/structural properties of the Si:H films. Controlled formation of amorphous Si nanoparticles into the bilayer a-Si:H/PAl. Influence of Si nanoparticles on the optical/structural properties of the Si:H films.