Phase measuring profilometry based on elliptically pattern grating

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• 作者：Xintian Bian ; Junpeng Xue ; Ju Cheng ; Baowei Ji ; Hualing Yu ; Xianyu Su ; Wenjing Chen
• 关键词：Information optics ; Phase measuring profilometry ; Fringe analysis ; Elliptically pattern grating ; Phase unwrap
• 刊名：Optik - International Journal for Light and Electron Optics
• 出版年：2013
• 出版时间：October, 2013
• 年：2013
• 卷：124
• 期：19
• 页码：3924-3928
• 全文大小：789 K

文摘

The present study proposes a new method for measuring the surface shape of an object using elliptically pattern grating projection. Based on phase measuring profilometry (PMP), elliptically pattern grating is projected on the surface of the object to measure its shape in 3D. The computing formula for solving the phase by the phase-shifting fringe method is derived, and the 3D shape formula for the altitude is reestablished. The error-contrastive analysis of the object's surface shape is re-established based on the proposed method and traditional PMP. The proposed method was shown to have a strong anti-noise ability and able to measure objects under high noise. More accurate measurement results were obtained by computer simulation and experiment to verify the feasibility of the proposed method.