A novel recovery strategy for deadlock caused by limited buffers in unified automated material handling systems was proposed in this paper.
A formal model is presented and sufficient conditions of deadlock are defined.
A novel recovery strategy using spare stockers as temporary buffers is put forward.
An effective heuristic algorithm for parallel deadlock resolving is presented.
Simulation results indicate that the proposed strategy is effective and feasible for real-time operation and large scale cases of UAMHS in semiconductor fabrication system.