A deadlock recovery strategy for unified automated material handling systems in 300 mm wafer fabrications
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- 作者：Qi Zhou ; Bing-Hai Zhou ; bhzhou@tongji.edu.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：Unified automated material handling systems (UAMHSs) ; Limited buffer ; Deadlock recovery ; Semiconductor manufacturing
- 刊名：Computers in Industry
- 出版年：2016
- 出版时间：January 2016
- 年：2016
- 卷：75
- 期：Complete
- 页码：1-12
- 全文大小：1968 K
文摘
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A novel recovery strategy for deadlock caused by limited buffers in unified automated material handling systems was proposed in this paper.
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A formal model is presented and sufficient conditions of deadlock are defined.
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A novel recovery strategy using spare stockers as temporary buffers is put forward.
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An effective heuristic algorithm for parallel deadlock resolving is presented.
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Simulation results indicate that the proposed strategy is effective and feasible for real-time operation and large scale cases of UAMHS in semiconductor fabrication system.