Modelling a micro-cantilever vibrating in vacuum, gas or liquid under thermal base excitation
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- 作者：Mojtaba Komeili ; carlo_menon@sfu.ca" class="auth_mail" title="E-mail the corresponding author ; Carlo Menon
- 关键词：Micro-electro-mechanical systems (MEMS) ; Micro-cantilever beam ; Harmonic response ; Thermal excitation ; Fluid dynamics
- 刊名：Mechanics Research Communications
- 出版年：2016
- 出版时间：April 2016
- 年：2016
- 卷：73
- 期：Complete
- 页码：39-46
- 全文大小：995 K
文摘
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A micro-cantilever excited by vertically moving thermal actuator is formulated.
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Effect of actuator on free vibration and harmonic response is discussed.
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Natural frequencies and harmonic response in presence of fluid mediums is studied.
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Quality factor of the vibration is studied with regards to ambient gas pressure.