Design and optimization of planar structure micro-hotplate

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• 作者：Zili Zhang^a ; Chenbo Yin ; ^a ; ^{yinchenbo@njut.edu.cn"" rel=""nofollow} ; Chunmin Tao^a ; Bin Zhu^a ; Ningning Dong^a
• 关键词：Micro-Hotplate ; Planar structure ; Thermal analysis ; Temperature Distribution ; Power Consumption
• 刊名：Procedia Engineering
• 出版年：2011
• 出版时间：2011
• 年：2011
• 卷：12
• 期：Complete
• 页码：105-110
• 全文大小：539 K

文摘

A new planar structure micro-hotplate is fabricated to simplify the manufacturing process of micro gas sensor and shows similar power consumption with the conventional stack one. Two new types of planar structure microhotplates are designed to uniform the temperature distribution on the sensitive film deposited on it and decrease the power consumption. As the result of the thermal analysis, the suspended planar structure is the most promising structure because of the homogeneous temperature distribution and the lower power consumption.