TiN films fabricated by reactive gas pulse sputtering: A hybrid design of multilayered and compositionally graded structures
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- 作者：Jijun Yanga ; jjyang@scu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Feifei Zhangb ; Qiang Wanc ; Chenyang Lub ; Mingjing Penga ; Jiali Liaoa ; Yuanyou Yanga ; Lumin Wangb ; Ning Liua ; nliu720@scu.edu.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：TiN film ; Composition-oscillation ; Multilayer ; Gradient ; Reactive sputtering ; RGP
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：15 December 2016
- 年：2016
- 卷：389
- 期：Complete
- 页码：255-259
- 全文大小：1764 K
文摘
- •
TiN films was fabricated by reactive gas pulse (RGP) sputtering approach.
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RGP
TiN film is a hybrid architecture of composition-gradient/multilayered structures.- •
Effect of deposition parameters on RGP
TiN film structure was evaluated.