Crystal orientation dependence of piezoresistivity in boron doped single crystalline diamond films
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- 作者：Kazuma Takenakaa ; Kazuma.Takenaka@jp.yokogawa.com" class="auth_mail" title="E-mail the corresponding author ; Hitoshi Umezawab ; Satoshi Katoa ; Akiyoshi Chayaharab ; Shin-ichi Shikatab ; 1
- 关键词：Piezoresistivity ; Single crystalline diamond (SCD) ; Crystal orientation ; Piezoresistive coefficient
- 刊名：Diamond & Related Materials
- 出版年：2016
- 出版时间：March 2016
- 年：2016
- 卷：63
- 期：Complete
- 页码：218-221
- 全文大小：708 K
文摘
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The piezoresistive coefficients of single crystalline diamond (SCD) were measured experimentally.
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The crystal orientation dependence of piezoresistivity in B-doped SCD films was definitely observed.
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The shear piezoresistive coefficient in B-doped SCD is exceptionally large due to its crystal orientation anisotropy.
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The shear piezoresistive coefficient in SCD was larger at lower B/C ratio.