Curved drilling via inner hole laser reflection
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- 作者：Hirofumi Hidai ; hidai@faculty.chiba-u.jp" class="auth_mail" title="E-mail the corresponding author ; Yousuke Kuroki ; Souta Matsusaka ; Akira Chiba ; Noboru Morita
- 关键词：Curved hole ; Laser drilling ; Borosilicate glass ; High-aspect-ratio hole
- 刊名：Precision Engineering
- 出版年：2016
- 出版时间：October 2016
- 年：2016
- 卷：46
- 期：Complete
- 页码：96-103
- 全文大小：1731 K
文摘
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Curved hole drilling via the reflection of the tilted sidewall was demonstrated.
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A curved hole with an average angle of ∼3° with curvature was drilled.
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A branched hole was also demonstrated by using the reflection of the tilted sidewall.