MOPA pulsed fiber laser for silicon scribing
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- 作者：Limei Yang ; Wei Huang ; whuang2008@sinano.ac.cn" class="auth_mail" title="E-mail the corresponding author ; Mengmeng Deng ; Feng Li
- 关键词：MOPA ; Fiber laser ; Laser ablation ; Thermal model ; Silicon ; Surface temperature ; Subject classification codes ; 140.3538 ; 140.3615 ; 140.6810 ; 140.3390
- 刊名：Optics & Laser Technology
- 出版年：2016
- 出版时间：June 2016
- 年：2016
- 卷：80
- 期：Complete
- 页码：67-71
- 全文大小：1465 K
文摘
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A 1064 nm MOPA pulsed fiber laser with flexible parameters was developed.
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A thermal model considering the laser pulse overlapping effect was built.
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We investigate the dependence of silicon scribe depth on system parameters.
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The ablation depth progressively saturates with the increasing of repeat times.
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The work is of great value to the optimization of MOPA laser material processing.