Ta/TiN midgap full-metal single gate fabrication using combined chlorine-based plasma and highly selective chemical metal etching for decananometer CMOS technology

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• 作者：Zhenkun Chen ; Emmanuel Dubois ; Florent Ravaux ; Francois Danneville
• 关键词：Full-metal single midgap gate ; Combined RIE/highly selective chemical etching process
• 刊名：Microelectronic Engineering
• 出版年：2012
• 出版时间：September, 2012
• 年：2012
• 卷：97
• 期：Complete
• 页码：280-284
• 全文大小：544 K

文摘

High permittivity dielectric and metal gate are now the most demanded in advanced CMOS technology to overcome conventional polysilicon gate structure drawbacks. However, existing metal gate fabrication approaches are not capable to meet all the demands in terms of material engineering or fabrication process. In this study, we present a two-step dry and wet etching strategy for the integration of tantalum and titanium nitride full-metal single gate, which offers a perfect vertical, roughness-free sidewall and an ultra high metal/dielectric etch rate selectivity.