Hard and wear resistant VB₂ coatings deposited by pulsed DC magnetron sputtering

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• 作者：Fangfang Ge¹ ; Chunli Chen¹ ; Rui Shu ; Fanping Meng ; Peng Li ; Feng Huang ; ^{huangfeng@nimte.ac.cn}
• 关键词：VB2 coatings ; Pulsed DC magnetron sputtering ; Hardness ; Wear
• 刊名：Vacuum
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：135
• 期：Complete
• 页码：66-72
• 全文大小：2201 K
• 卷排序：135

文摘

VB2 coatings were deposited using pulsed DC magnetron sputtering. Effect of the deposition parameters on the structure and properties was studied. The dense VB2 coatings have high hardness (>30 GPa). The VB2 coatings exhibits good wear resistance with the wear rate of 10−16 m3/N m.