Influence of SHI irradiation in nanodimensional polycrystalline fluoride thin films (LiF, CaF2 and BaF2) is investigated. Nanograin fragmentation is observed with increasing ion fluence. Saturation in the nanograin fragmentation at higher fluence is shown. The track radius and damage cross section are deduced from peak width and area of the dominant diffraction. First time the track radius in BaF2 is reported.