刊名:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
出版年:2017
出版时间:1 February 2017
年:2017
卷:392
期:Complete
页码:8-13
全文大小:1774 K
卷排序:392
文摘
The transmission process of electrons and irradiation uniformity was simulated. Influence of the irradiation parameters on irradiation uniformity are discussed. High irradiation uniformity can be obtained in a wide processing window.