Electrodepositing amorphous Ni-W alloys for MEMS
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- 作者：Hong Wang ; Rui Liu ; FengJi Cheng ; Ying Cao ; GuiFu Ding ; XiaoLin Zhao
- 关键词：Ni-W ; amorphous ; corrosion resistance ; wearing resistance ; MEMS
- 刊名：Microelectronic Engineering
- 出版年：2010
- 出版时间：October 2010
- 年：2010
- 卷：87
- 期：10
- 页码：1901-1906
- 全文大小：860 K
文摘
The wearing resistance and corrosion resistance of Ni-W alloy films is more excellent than that of Ni film. As a contrast, wearing resistance and corrosion resistance of Ni and NiW films are investigated in this paper. The results show that electrodeposited amorphous Ni-W alloy films have good wearing resistance and excellent corrosion resistance compared with electrodeposited Ni films. Moreover, the Ni-W alloy films still had good properties after heat treatment. The good wearing resistance and corrosion resistance of amorphous Ni-W alloy films are associated with crystal structure. The micro-spinneret is fabricated successfully with amorphous Ni-W alloys by UV-LIGA technology.